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CNF Lab and Equipment Information
     Schedule Training   ¦

Trion Etcher

Cr ICP system

Manager: Jeremy Clark
Backup: Tom Pennell , Vince Genova
Equipment Training
Training is scheduled on an as needed basis. Email your request.


Trion Minilock III is an RIE/ICP system who purpose is to etch Chrome.


The system has both chlorinated and fluorinated gases and is capable of handling up to 8-inch wafers and 7" square plates.

Processes Available:

Chrome etch processes are presently available on the tool.

Additional Resources:

Equipment Information Sheet

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