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Trion Etcher

Cr ICP system

Manager: Jeremy Clark
Backup: Tom Pennell , Vince Genova


Trion Minilock III is an RIE/ICP system who purpose is to etch Chrome.


The system has both chlorinated and fluorinated gases and is capable of handling up to 8-inch wafers and 7" square plates.

Processes Available:

Chrome etch processes are presently available on the tool.

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