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SEMS / MICROSCOPES
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Zyvex Nanoprobes for Ultra SEM
CAC Name: Zyvex Electrical Testing and Nanomanipulation 
Manager: Daron Westly
Backup: Rob Ilic
Equipment Training
Training is done on an as needed basis. Please contact the tool manager for training. Description:The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 sem and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips. Combined with a Keithley 4200 semiconductor characterization system, the Zyvex S-100 provides the capability to probe truly nanoscale devices, as well as driving and characterizing MEMS structures. Additionally, each individual probe has five input/output channels, adding the necessary flexibility to characterize even more complex devices yet to be designed. Capabilities:
Applications:
Results:
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Missing SEM chucks
May 14, 2013 A 4" wafer holder and single stub holder are missing from the SEMs. If you have taken one or both of these then please return them. 
SEMS / MICROSCOPES
AFM - DI3100 AFM - Veeco Icon BX51 Fluorescence Microscope Focused Ion Beam - Hitachi FB-2000A Hitachi S-900 Nikon Eclipse L200N and Other Optical Inspection Microscopes Nikon Microscope Cameras Olympus Confocal Microscope SEM Sample Prep Sputtering System Zeiss Supra SEM Zeiss Ultra SEM Zyvex Nanoprobes for Ultra SEM Back to Equipment List |
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Cornell NanoScale Science & Technology Facility (CNF) 250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700 Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu Powered by ITX |
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