CNF - Lab and Equipment Information

CNF Lab and Equipment Information

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Zeiss Ultra SEM

Ultra High Resolution Field Emission SEM

Manager: Daron Westly

Backup: Rob Ilic

Equipment Training
Training is held every Thursday morning at 10am. Please sign up online. Please do not come to the training unless you have a confirmed reservation. There is only room for 3 people at each training.

Description:

Scanning electron microscopy is critical for the analysis of nanoscale materials and structures. CNF operates two field emission scanning electron microscopes (SEMs): a Zeiss Supra 55 microscope capable of variable pressure (VP) operation and a Zeiss Ultra 55 microscope optimized for high resolution imaging. Like most modern SEMs, both systems are capable of operating at beam energies from 100 V to 30 kV. However, the unique electron optical design employed in the Zeiss systems enables unsurpassed performance at beam energies from 100 V to 8 kV. This is crucial for obtaining high resolution distortion free images of surface.

The Ultra 55 is designed to maximize imaging resolution at low beam energies. It is equipped with a backscatter electron detector engineered to image electrons with energies less than 2 keV. An energy filter incorporated into the detector enables energy selective backscatter (ESB) imaging. This signal can be used to obtain contrast between regions of different composition.

Capabilities:

In Lens Energy Selective Backscatter (ESB) Detector
Backscatter imaging using 100 eV to 3 keV beam energies

Additional Resources:

Equipment Information Sheet
CNF SEM basics
JEOL guide to SEM
CNF SEM video training reference

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Missing SEM chucks
May 14, 2013
A 4" wafer holder and single stub holder are missing from the SEMs. If you have taken one or both of these then please return them.

Notice Archive

SEMS / MICROSCOPES

AFM - DI3100
AFM - Veeco Icon
BX51 Fluorescence Microscope
Focused Ion Beam - Hitachi FB-2000A
Hitachi S-900
Nikon Eclipse L200N and Other Optical Inspection Microscopes
Nikon Microscope Cameras
Olympus Confocal Microscope
SEM Sample Prep Sputtering System
Zeiss Supra SEM
Zeiss Ultra SEM
Zyvex Nanoprobes for Ultra SEM

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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu