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CATS Pattern Conversion and Proximity Correction Suite

Computer Aided Transcription System (CATS) Pattern Conversion Suite for CAD Data Manipulation and Conversion

Manager: Alan R. Bleier
Backup: Garry Bordonaro

Description:

Fracturing, and the associated options and capabilities, is the heart of the Computer Aided Transcription System (CATS) package. The CATS tool takes in GDSII design data and converts it into the data formats needed to drive machines that write, measure and inspect masks and wafers. This may be the conversion of the polygons in design data (CIF™, DXF™ or GDS-II™) to the rectangles and trapezoids in an E-beam tooling file or inspection database, or it may be the rectangles and rotated rectangles in an optical pattern generator data file. It may also be the refracture of a set of data to perform scaling or sizing operations.

Capabilities:

  • Fracturing: CAD data can be converted into data files ready for the GCA PG, JEOL 9300FS, or the Leica VB-6
  • Data Manipulation: Prior to fracturing the data can be resized, scaled, rotated, and many other options to optimize the pattern data.


Additional Resources:

CATS GUI Quick Start
Logging into the CNF Linux Conversion Computers


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Qualified Operating Systems
Feb 12, 2013
CNF IT has Qualified the following operating systems for use at the facility:

Windows XP and Windows 7
Mac OS X 10.6 - 10.8
RedHat Enterprise Linux v4 and v6
Fedora Linux 15 and Fedora Linux 17
Apple iOS
Android Gingerbread
Android Jellybean

CNF IT has not qualified and does not currently recommend Windows 8 .
Notice Archive

EQUIPMENT LIST
COMPUTING

CATS Pattern Conversion and Proximity Correction Suite
Computer Workstations
Coral
Coral SeaBird
Design Workshop
File Transfer Share for Tools
GenISys Layout BEAMER - E-beam Pattern Conversion and Proximity Correction
Intel Computing Cluster
JGDS2 - Java GDS Library
L-Edit CAD Software
LinkCAD pattern preparation software
Litho Resources
Login IDs
Mobile CNFUsers Site
PROLITH by KLA-Tencor
WhoIAm
WIKI

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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu
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