CNF - Lab and Equipment Information

CNF Lab and Equipment Information

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Suss MA6-BA6 Contact Aligner

CAC Name: MA6/BA6

Karl Suss MA/BA 6 Contact Aligner

Manager: Edward Camacho

Backup: Garry Bordonaro , Rob Ilic

Equipment Training
Training is usually offered weekly, and often at a time convenient to the needs of the new users for the week. Please contact the tool manager for the training schedule.

Description:

This contact aligner uses 280-350 nm light to expose wafers up to 150mm diameter. The system features an infrared camera for alignment to patterns on the backside of the wafer. The versitile mask holder allows both round and square plates as masks, and the sample plate accomodates small and odd-shaped substrates.

Capabilities:

Contact lithography system
Backside infrared alignment
Flood field exposure
Overlay accuracy to 1 um
Substrate size up to 150mm

Additional Resources:

Equipment Information Sheet
Contact Lithography Alignment Keys
Contact Aligner Resist Matrix

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Photolithograhy Training Sessions for the Week of June 17th
Jun 18, 2013
General Photolithography training will be held Tuesday at 1:30 PM. Meet in the Spinner Room.

MA6 Mask Aligner training session will be held
Wednesday at 10:00AM. Meet in the Contact Aligner Room.

ABM Mask Aligner training session will be held
Thursday at 10:00AM. Meet in the Contact Aligner Room.

PG training will be scheduled based on requests.

Please review the materials available at each of the web pages associated with the tools above.

PLEASE BE ON TIME!
__________
Edwar ...more

SPACE AVAILABLE in Microfluidics Course
Jun 18, 2013
The NBTC is offering a 3-day course covering the design, fab, and assembly of microfluidic devices. The course is offered June 26-28. Contact Teresa Porri if interested. Only a few slots left! 254-5200.

Notice Archive

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu