E beam lithography shutdown for UPS replacement May 30 - June 5
May 23, 2013
The two JEOL electron beam lithography systems will be shut down during the steam shutdown for replacement of the uninterruptible power supply (UPS) that supplies power to both systems. They may be available for use by Wed., June 5, but if there are delays in the UPS installation they may be unavailable for the entire week of June 3 - 7. Another notice will be posted when more information is available about the restart date.

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Electron Beam Lithography General Training
May 13, 2013
Every Tuesday from 11:30 am to 2:00 pm in 254 Duffield Hall there will be a general introduction to electron beam lithography, which covers both the JEOL 6300 and the JEOL 9500.

Before attending this training, please supply the information about your project which is requested under Equipment Training on the JEOL 6300 web page, http://www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_id=171 .

This session covers tool specifications, radiation safety, pattern conversion software, ...more

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Notice Archive

ELECTRON-BEAM LITHOGRAPHY

Electron beam Resist Spinners
JEOL 6300
JEOL 9300
JEOL 9500

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