JEOL 9500 Update
Jun 19, 2013
The 9500 is now back online. We believe we know what caused this problem so we are hopeful it will not occur again. The tool is now available for use but please report any problems you might have while we continue monitoring the issue.

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The 9500 just went down again with the same issue we experienced last week. The engineer will back out to continue looking into the issue and we will post an update when we know more.


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JEOL 6300 is back up with all beam currents available
Jun 10, 2013
The JEOL 6300 is now available with all standard beam currents available.

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Electron Beam Lithography General Training
May 13, 2013
Every Tuesday from 11:30 am to 2:00 pm in 254 Duffield Hall there will be a general introduction to electron beam lithography, which covers both the JEOL 6300 and the JEOL 9500.

Before attending this training, please supply the information about your project which is requested under Equipment Training on the JEOL 6300 web page, http://www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_id=171 .

This session covers tool specifications, radiation safety, pattern conversion software, ...more

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Notice Archive

ELECTRON-BEAM LITHOGRAPHY

Electron beam Resist Spinners
JEOL 6300
JEOL 9300
JEOL 9500

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