JEOL 9500 Update
Jun 18, 2013
The JEOL 9500 should be back online Wednesday afternoon. We are running a final test overnight which we don't expect to have any problems with. Wednesday morning we will need to create all the condition files. After this the tool will be back up.

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The 9500 is currently having some kind of communication problem causing the software to lock up. At the beginning of an exposure the software will crash during pattern transfer. The service engineer ...more

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JEOL 6300 is back up with all beam currents available
Jun 10, 2013
The JEOL 6300 is now available with all standard beam currents available.

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Electron Beam Lithography General Training
May 13, 2013
Every Tuesday from 11:30 am to 2:00 pm in 254 Duffield Hall there will be a general introduction to electron beam lithography, which covers both the JEOL 6300 and the JEOL 9500.

Before attending this training, please supply the information about your project which is requested under Equipment Training on the JEOL 6300 web page, http://www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_id=171 .

This session covers tool specifications, radiation safety, pattern conversion software, ...more

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Notice Archive

ELECTRON-BEAM LITHOGRAPHY

Electron beam Resist Spinners
JEOL 6300
JEOL 9300
JEOL 9500

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