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Hamatech Hot Piranha

Automatic Wafer Processor for SC-1 & Piranha cleans

Hamatech Hot Piranha Backup: Garry Bordonaro
Equipment Training
Please contact the tool manager to schedule training

Description:

The Hamatech wafer processor is capable of doing a hot piranha (Sulfuric Acid and Hydrogen Peroxide) clean on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). It is also capable of performing ammonium hydroxide brush cleans of substrates.

Capabilities:

  • Hot piranha clean
  • 4
  • 3
  • Ammonium hydroxide brush clean


Additional Resources:

Equipment Information Sheet


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PlasmaTherm service visit 9/15 to 9/26
Sep 09, 2014
PlasmaTherm will be on site for the weeks of 9/15 and 9/22 to perform control computer upgrades to the PT720/740, PT770, Unaxis and Versaline. The goal for the week of 9/15 is to upgrade both the PT720/740 an the PT770. The schedule may change depending on progress.

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