ComputingCleanroom and Equipment StatusCoral - XReporter
Button: Equipment ListButton: MSDS DatabaseButton: Policies & FormsButton: Education & TrainingButton: StaffButton: Events & Seminars Button: Publication Button: About CNF Button: Lab Manual

CNF Lab and Equipment Information
     Schedule Training   ¦

Hamatech Hot Piranha

Automatic Wafer Processor for SC-1 & Piranha cleans

Hamatech Hot Piranha Backup: Garry Bordonaro
Equipment Training
Please contact the tool manager to schedule training


The Hamatech wafer processor is capable of doing a hot piranha (Sulfuric Acid and Hydrogen Peroxide) clean on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). It is also capable of performing ammonium hydroxide brush cleans of substrates.


  • Hot piranha clean
  • 4
  • 3
  • Ammonium hydroxide brush clean

Additional Resources:

Equipment Information Sheet

Back to Top

PlasmaTherm service visit 9/15 to 9/26
Sep 09, 2014
PlasmaTherm will be on site for the weeks of 9/15 and 9/22 to perform control computer upgrades to the PT720/740, PT770, Unaxis and Versaline. The goal for the week of 9/15 is to upgrade both the PT720/740 an the PT770. The schedule may change depending on progress.


Button: Search Button: Search Keywords
Cornell University