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CNF Lab and Equipment Information
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Hamatech Hot Piranha

Automatic Wafer Processor for SC-1 & Piranha cleans

Hamatech Hot Piranha Backup: Garry Bordonaro
Equipment Training
Please contact the tool manager to schedule training


The Hamatech wafer processor is capable of doing a hot piranha (Sulfuric Acid and Hydrogen Peroxide) clean on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). It is also capable of performing ammonium hydroxide brush cleans of substrates.


  • Hot piranha clean
  • 4
  • 3
  • Ammonium hydroxide brush clean

Additional Resources:

Equipment Information Sheet

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