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Hamatech Hot Piranha

Automatic Wafer Processor for SC-1 & Piranha cleans

Hamatech Hot Piranha Backup: Garry Bordonaro
Equipment Training
Please contact the tool manager to schedule training

Description:

The Hamatech wafer processor is capable of doing a hot piranha (Sulfuric Acid and Hydrogen Peroxide) clean on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). It is also capable of performing ammonium hydroxide brush cleans of substrates.

Capabilities:

  • Hot piranha clean
  • 4
  • 3
  • Ammonium hydroxide brush clean


Additional Resources:

Equipment Information Sheet


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New AJA Ion Mill arriving - Veeco Ion Mill Going Away
Jan 15, 2014
1/15/14
CNF purchased a new fully automated, AJA ion mill with a 22cm Kaufman source. We will receive the system at the end of January/beginning of February time frame. Upon arrival we will install the system. This requires the removal of the existing Veeco ion mill. Consequently we will have a downtime of about a month or two without ion milling capabilities.
Chrome Etch on Hamatech is back UP
Apr 23, 2014
Automatic Chrome Etching on Hamatech Mask Processor is back UP.

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