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CNF Lab and Equipment Information
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Click the tool name for detailed information.
THIN FILM DEPOSITION
1. SC4500 Odd-Hour Evaporator (SC4500 Odd)
CVC SC4500 Combination Thermal/ E-gun Evaporation System for deposition of thin films
2. SC4500 Even-Hour Evaporator (SC4500 Even)
CVC SC4500 E-gun Evaporation System for deposition of thin films
AJA Sputter Deposition (AJA)
Load-lock single wafer, AJA sputter tool for deposition of thin metallic and dielectric films
CHA Evaporator (CHA)
3 Hearth Thermal Evaporator for Metal Films
CVC Sputter Deposition (CVC)
Magnetron Sputter system for depositing thin metal & dielectric films
Electroplating Tanks (Elec Plate)
Equipment for electroplating various metals
GSI PECVD (GSI)
GSI Plasma Enhanced Chemical Vapor Deposition System
Oxford ALD FlexAL (ALD)
Atomic Layer Deposition
Oxford PECVD (PECVD)
Oxford 100 PECVD System
Parylene Deposition (Parylene)
Tool for depositing conformal parylene films (Rm 228)
PVD75 Sputter Deposition
ITO Sputter Deposition System
ReynoldsTech Conductive Polymer Vapor Deposition Tool (ReynoldsTech Conductive Polymer Vapor Deposition Tool - Rm 224)
Cluster tool for vapor-deposition of PEDOT or similar polymers
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ALD service scheduled extended to May 24
May 17, 2013 The system will be unavailable until May 24. 
THIN FILM DEPOSITION
1. SC4500 Odd-Hour Evaporator 2. SC4500 Even-Hour Evaporator AJA Sputter Deposition CHA Evaporator CVC Sputter Deposition Electroplating Tanks GSI PECVD Oxford ALD FlexAL Oxford PECVD Parylene Deposition PVD75 Sputter Deposition ReynoldsTech Conductive Polymer Vapor Deposition Tool Back to Equipment List |
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Cornell NanoScale Science & Technology Facility (CNF) 250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700 Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu Powered by ITX |
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