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Click the tool name for detailed information.
PHOTOLITHOGRAPHY
ABM Contact Aligner 
Flexible 200mm Mask Aligner with DUV light source
ASML 300C DUV Stepper 
ASML PAS 5500/300C DUV Stepper
Autostep i-line Stepper 
GCA Autostep 200 DSW i-line Wafer Stepper
Gamma Automatic Coat-Develop Tool 
Suss MicroTec Gamma Cluster Tool
GCA 5x Stepper 
GCA 6300 DSW Projection Mask Aligner, 5X g-line Stepper
Hamatech-Steag Mask Processors 
Automated Tools for Processing Photomasks
Hamatech-Steag Wafer Processors 
Automated Tools for Developing Wafers
Heidelberg Mask Writer DWL2000 
DWL2000 Laser Pattern Generator and Direct Writer
Heidelberg Mask Writer DWL66FS 
DWL66FS Laser Pattern Generator and Direct Write System
JBA 1000 Photoresist UV Cure 
Tool for UV Curing of photoresist
Karl Suss RC-8 
SussTec GYRSET wafer spin tool
Manual Resist Spinners 
Resist Spinners
Nanoimprint NX-2500 
Nanoimprint Lithography
Photolithography Hot Plates 
Hot plates for baking photoresist
Resist Hot Strip Bath 
Heated solvent for photoresist stripping
SU-8 Hotplates 
Hotplates for baking SU-8-coated wafers
SUEX/ADEX Laminator 
Laminator for SUEX and ADEX sheets
Suss MA6-BA6 Contact Aligner 
SUSS MicroTech MA/BA 6 Contact Aligner
Suss SCIL Imprint 
UV Imprint Lithography
YES Image Reversal Oven 
Photoresist image reversal oven
YES Polyimide Bake Oven 
Oven for curing polyimide and other polymer films
YES Vapor Prime Oven 
Vacuum oven for HMDS wafer priming


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