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CNF Lab and Equipment Information
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Click the tool name for detailed information.
PACKAGING & MISC PROCESSING
Chemical Mechanical Polishing CMP - 6EC (CMP)
Strasbaugh 6EC Chemical Mechanical Polishing Tool
CorSolutions Microfluidic Probe Station
Characterization tool for microfluidic devices
Critical Point Dryer (Tousimis CPD)
Equipment for critical point drying of MEMS structures to avoid stiction
Dicing Saw - KS 7100 (WAFER_SAW)
K&S 7100 Dicing Saw
Dimatix Printer
Tool for printing a variety of materials onto substrates (Rm 224).
Hamatech Post CMP Brushcleaner
Wafer processor for cleaning wafers after CMP
Hot Press
Heated press for hot embossing
Ion Implant - Eaton (Eaton Implanter)
Ion Implanter
KS Bonder
K&S Gold Ball Bonder
Microdrill
Custom made drill for microfluidic through holes
MVD100 (MVD100)
Molecular Vapor Deposition Tool for Surface Modification
PDMS Casting Station (PDMS station)
Plasma generator,curing ovens, vacuum jar and scale
Rapid Thermal Processer - AG8108 (RTP 8108)
8108
RTA - AG610 (AG)
Rapid Thermal Anneal - AG Associates Model 610
Suss SB8e Substrate Bonder
Universal tool for bonding processes for micro-electro-mechanical systems
Versalaser Cutting/Engraving Tool (Versalaser Engraver/Cutter Tool-Rm 224)
CO2 laser cutter/engraver
Wire Bonder
Westbond 7400A Ultrasonic Wire Bonder
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PACKAGING & MISC PROCESSING
Chemical Mechanical Polishing CMP - 6EC CorSolutions Microfluidic Probe Station Critical Point Dryer Dicing Saw - KS 7100 Dimatix Printer Hamatech Post CMP Brushcleaner Hot Press Ion Implant - Eaton KS Bonder Microdrill MVD100 PDMS Casting Station Rapid Thermal Processer - AG8108 RTA - AG610 Suss SB8e Substrate Bonder Versalaser Cutting/Engraving Tool Wire Bonder Back to Equipment List |
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Cornell NanoScale Science & Technology Facility (CNF) 250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700 Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu Powered by ITX |
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