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![]() Click the tool name for detailed information.
ETCHING
Acid Etching Tanks
Tanks for hot Phosphoric acid and Nanostrip etching of wafers
Anatech Resist Strip
Anatech Plasma Asher
Aura 1000 Resist Strip
Gasonics downstream asher for dry stripping of photoresist
Branson Resist Strip
Oxygen plasma barrel asher for Photoresist/organic removal
Glen 1000 Resist Strip
Oxygen Plasma tool for removal of organics
Hamatech Hot Piranha
Automatic Wafer Processor for SC-1 & Piranha cleans
Hamatech Hot SC1/SC2
Automatic Single Wafer Processor for SC-1 & SC-2 cleans
KOH Etching
A heated bath of Potassium Hydroxide (KOH)
Oxford 100 Etcher
Oxford PlasmaLab 100 RIE System for fluorine based ICP deep SiO2/glass etching
Oxford 81 Etcher
Oxford PlasmaLab 80+ RIE System for fluorine based etching of oxide, nitride, & silicon
Oxford 82 Etcher
with endpoint detection
Oxford Cobra ICP Etcher
Oxford Cobra HBr etcher
PlasmaTherm Deep Si Etcher
DRIE silicon etch
Primaxx Vapor HF Etcher
Vapor HF Isotropic Release Etching
PT72 Etcher
PlasmaTherm 72 Fluorine based Reactive Ion Etcher
PT720-740 Etcher
PlasmaTherm720/740 Chlorine-based RIE system for Silicon & Aluminum etching
PT770 Etcher
PlasmaTherm 770 two chamber inductively coupled plasma etching system for plasma etching using Chlorine or Fluorine
Trion Etcher
Cr ICP system
Unaxis 770 Deep Si Etcher
Bosch Etcher for deep silicon etching
Xactix Xenon Difluoride Etcher
Xactix XeF2 Isotropic silicon etch system
YES Asher
YES CV200RFS Oxygen Plasma Asher
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![]() This material is based upon work supported by the National Science Foundation under Grant No. NNCI-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. If you have a disability and are having trouble accessing information on this website or need materials in an alternate format, contact web-accessibility@cornell.edu for assistance. Cornell NanoScale Science & Technology Facility (CNF) 250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700 Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu Powered by ITX |