CNF - Lab and Equipment Information

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ELECTRON-BEAM LITHOGRAPHY

Electron beam Resist Spinners

Manual Resist Spinners for coating substrates with electron beam resist.

JEOL JBX-6300FS 100 kV Electron Beam Lithography System

JEOL JBX-9300FS Electron Beam Lithography System - RETIRED

JEOL JBX9500FS Electron Beam Lithography System - INSTALLATION BEGINS IN JANUARY

Cornell University

NYSTAR

NNIN

NSF

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu