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Electron beam Resist Spinners
Manual Resist Spinners for coating substrates with electron beam resist.
JEOL JBX-6300FS 100 kV Electron Beam Lithography System
JEOL JBX-9300FS Electron Beam Lithography System - RETIRED
JEOL JBX9500FS Electron Beam Lithography System - INSTALLATION BEGINS IN JANUARY
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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