CNF - Lab and Equipment Information

Button: Contact CNF

Button: Multimedia

Button: About CNF

Button: Getting Started

Button: Publication

Button: REU Program

Button: Events & Seminars

Button: Education Outreach

Button: Technologies

Button: Lab Equipment

Click the tool name for detailed information.

ELECTRON-BEAM LITHOGRAPHY

E-Beam Lithography Hotplates

Hot plates for baking electron beam lithography resist

E-Beam Lithography Resist Spinners

Manual Resist Spinners for coating substrates with electron beam resist.

General Electron Beam Lithography Training

Introduction to electron beam lithography

JEOL JBX-6300FS 100 kV Electron Beam Lithography System

JEOL JBX9500FS Electron Beam Lithography System

Nabity ebeam system for Supra

Cornell University

NYSTAR

NSF

This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu