Click the tool name for detailed information.
E-Beam Lithography Hotplates
Hot plates for baking electron beam lithography resist
E-Beam Lithography Resist Spinners
Manual Resist Spinners for coating substrates with electron beam resist.
General Electron Beam Lithography Training
Introduction to electron beam lithography
JEOL JBX-6300FS 100 kV Electron Beam Lithography System
JEOL JBX9500FS Electron Beam Lithography System
Nabity ebeam system for Supra
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This material is based upon work supported by the National Science Foundation under Grant No. NNCI-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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